Therma-Wave

Address:
1250 Reliance Way
Fremont, CA 94539
510-490-3663

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Home Page: www.thermawave.com

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Category:
Semiconductor Manufacturers Equipment & Supplies

Additional Company Information:
Therma-Wave was established in 1982 by Dr. Allan Rosencwaig and David Willenborg. The company owns over 150 U.S. and foreign patents covering the technology utilized in its major product lines: Therma-Wave, Inc. has been revolutionizing process control metrology systems through innovative, proprietary products and technologies. In 1985, Therma-Wave revolutionized ion implant measurement by introducing the Therma-Probe®, which uses patented Thermal Wave technology. As a result of this measurement technology, semiconductor wafers that might have once been discarded remained in the production cycle to completion, giving IC manufacturers a potential savings of millions of dollars a year. The company entered the film-thickness measurement market in 1992 with the introduction of its Opti-Probe® product line tool. This product combined additional Therma-Wave patented technologies into one tool that made it possible to determine the thickness and optical characteristics of multiple thin films simultaneously, thus allowing semiconductor manufacturers to launch next generation semiconductors without many of the essential process control uncertainties they faced in the past. In January 2002, Therma-Wave introduced Opti-Probe CD with Real Time CD processing (RT/CD®), a product designed to measure the lateral critical dimensions and cross-sectional shape, or profile, of fine IC features. As semiconductor device manufacturers continue to shrink feature sizes to the 65 nm technology node and smaller, traditional CD metrology techniques lack the resolution required to provide accurate data about feature critical dimensions and profiles. This non-destructive CD measurement technology is extendable to the 45 nm technology node and beyond for a wide range of critical dimension applications.